5/7/2010	7:50:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2010	7:50:25 AM	Recipe started at 7:50 AM
5/7/2010	7:50:25 AM	H2 valve closed
5/7/2010	7:50:25 AM	BCl3 valve closed
5/7/2010	7:50:25 AM	PH3 valve closed
5/7/2010	7:50:25 AM	SiCl4 pre valve closed
5/7/2010	7:50:25 AM	SiCl4 post valve closed
5/7/2010	7:50:25 AM	Main Vac valve closed
5/7/2010	7:50:25 AM	Bypass valve closed
5/7/2010	7:50:25 AM	Bubbler valve closed
5/7/2010	7:50:25 AM	Helium valve opened
5/7/2010	7:50:25 AM	Helium MFC set to  500.000000
5/7/2010	7:50:25 AM	H2 MFC set to  0.000000
5/7/2010	7:50:25 AM	BCl3 MFC set to  0.000000
5/7/2010	7:50:25 AM	SiCl4 MFC set to  0.000000
5/7/2010	7:50:25 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	7:50:25 AM	Tube furnace set to 0
5/7/2010	7:51:16 AM	Helium valve closed
5/7/2010	7:51:16 AM	H2 valve closed
5/7/2010	7:51:16 AM	BCl3 valve closed
5/7/2010	7:51:16 AM	PH3 valve closed
5/7/2010	7:51:16 AM	SiCl4 pre valve closed
5/7/2010	7:51:16 AM	SiCl4 post valve closed
5/7/2010	7:51:16 AM	Main Vac valve closed
5/7/2010	7:51:16 AM	Bypass valve closed
5/7/2010	7:51:16 AM	Bubbler valve closed
5/7/2010	7:51:16 AM	Helium MFC set to  0.000000
5/7/2010	7:51:16 AM	H2 MFC set to  0.000000
5/7/2010	7:51:16 AM	BCl3 MFC set to  0.000000
5/7/2010	7:51:16 AM	SiCl4 MFC set to  0.000000
5/7/2010	7:51:16 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	7:51:17 AM	Tube furnace set to 0
5/7/2010	7:51:17 AM	Run finished at 7:51 AM
5/7/2010	7:51:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2010	8:02:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	8:02:10 AM	Recipe started at 8:02 AM
5/7/2010	8:02:10 AM	Helium valve closed
5/7/2010	8:02:10 AM	H2 valve closed
5/7/2010	8:02:10 AM	BCl3 valve closed
5/7/2010	8:02:10 AM	PH3 valve closed
5/7/2010	8:02:10 AM	SiCl4 pre valve closed
5/7/2010	8:02:10 AM	SiCl4 post valve closed
5/7/2010	8:02:10 AM	Main Vac valve closed
5/7/2010	8:02:10 AM	Bubbler valve closed
5/7/2010	8:02:10 AM	Bypass valve opened
5/7/2010	8:02:10 AM	Helium MFC set to  0.000000
5/7/2010	8:02:10 AM	H2 MFC set to  0.000000
5/7/2010	8:02:10 AM	BCl3 MFC set to  0.000000
5/7/2010	8:02:10 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:02:10 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:02:10 AM	Tube furnace set to 0
5/7/2010	8:02:55 AM	Helium valve closed
5/7/2010	8:02:55 AM	H2 valve closed
5/7/2010	8:02:55 AM	BCl3 valve closed
5/7/2010	8:02:55 AM	PH3 valve closed
5/7/2010	8:02:55 AM	SiCl4 pre valve closed
5/7/2010	8:02:55 AM	SiCl4 post valve closed
5/7/2010	8:02:55 AM	Bubbler valve closed
5/7/2010	8:02:55 AM	Main Vac valve opened
5/7/2010	8:02:55 AM	Bypass valve opened
5/7/2010	8:02:55 AM	Helium MFC set to  0.000000
5/7/2010	8:02:55 AM	H2 MFC set to  0.000000
5/7/2010	8:02:55 AM	BCl3 MFC set to  0.000000
5/7/2010	8:02:55 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:02:55 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:02:55 AM	Tube furnace set to 0
5/7/2010	8:02:55 AM	Run finished at 8:02 AM
5/7/2010	8:02:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	8:03:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/7/2010	8:04:02 AM	Recipe started at 8:03 AM
5/7/2010	8:04:02 AM	H2 valve closed
5/7/2010	8:04:02 AM	BCl3 valve closed
5/7/2010	8:04:02 AM	PH3 valve closed
5/7/2010	8:04:02 AM	SiCl4 pre valve closed
5/7/2010	8:04:02 AM	SiCl4 post valve closed
5/7/2010	8:04:02 AM	Main Vac valve closed
5/7/2010	8:04:02 AM	Bypass valve closed
5/7/2010	8:04:02 AM	Bubbler valve closed
5/7/2010	8:04:02 AM	Helium valve opened
5/7/2010	8:04:02 AM	Helium MFC set to  500.000000
5/7/2010	8:04:02 AM	H2 MFC set to  0.000000
5/7/2010	8:04:02 AM	BCl3 MFC set to  0.000000
5/7/2010	8:04:02 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:04:02 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:04:02 AM	Tube furnace set to 0
5/7/2010	8:05:24 AM	Helium valve closed
5/7/2010	8:05:24 AM	H2 valve closed
5/7/2010	8:05:24 AM	BCl3 valve closed
5/7/2010	8:05:24 AM	PH3 valve closed
5/7/2010	8:05:24 AM	SiCl4 pre valve closed
5/7/2010	8:05:24 AM	SiCl4 post valve closed
5/7/2010	8:05:24 AM	Main Vac valve closed
5/7/2010	8:05:24 AM	Bypass valve closed
5/7/2010	8:05:24 AM	Bubbler valve closed
5/7/2010	8:05:24 AM	Helium MFC set to  0.000000
5/7/2010	8:05:24 AM	H2 MFC set to  0.000000
5/7/2010	8:05:24 AM	BCl3 MFC set to  0.000000
5/7/2010	8:05:24 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:05:24 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:05:24 AM	Tube furnace set to 0
5/7/2010	8:05:39 AM	Helium valve closed
5/7/2010	8:05:39 AM	H2 valve closed
5/7/2010	8:05:39 AM	BCl3 valve closed
5/7/2010	8:05:39 AM	PH3 valve closed
5/7/2010	8:05:39 AM	SiCl4 pre valve closed
5/7/2010	8:05:39 AM	SiCl4 post valve closed
5/7/2010	8:05:39 AM	Main Vac valve closed
5/7/2010	8:05:39 AM	Bubbler valve closed
5/7/2010	8:05:39 AM	Bypass valve opened
5/7/2010	8:05:39 AM	Helium MFC set to  0.000000
5/7/2010	8:05:39 AM	H2 MFC set to  0.000000
5/7/2010	8:05:39 AM	BCl3 MFC set to  0.000000
5/7/2010	8:05:39 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:05:39 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:05:39 AM	Tube furnace set to 0
5/7/2010	8:06:10 AM	Helium valve closed
5/7/2010	8:06:10 AM	H2 valve closed
5/7/2010	8:06:10 AM	BCl3 valve closed
5/7/2010	8:06:10 AM	PH3 valve closed
5/7/2010	8:06:10 AM	SiCl4 pre valve closed
5/7/2010	8:06:10 AM	SiCl4 post valve closed
5/7/2010	8:06:10 AM	Bubbler valve closed
5/7/2010	8:06:10 AM	Main Vac valve opened
5/7/2010	8:06:10 AM	Bypass valve opened
5/7/2010	8:06:10 AM	Helium MFC set to  0.000000
5/7/2010	8:06:10 AM	H2 MFC set to  0.000000
5/7/2010	8:06:10 AM	BCl3 MFC set to  0.000000
5/7/2010	8:06:10 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:06:10 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:06:10 AM	Tube furnace set to 0
5/7/2010	8:11:10 AM	H2 valve closed
5/7/2010	8:11:10 AM	BCl3 valve closed
5/7/2010	8:11:10 AM	PH3 valve closed
5/7/2010	8:11:10 AM	SiCl4 pre valve closed
5/7/2010	8:11:10 AM	SiCl4 post valve closed
5/7/2010	8:11:10 AM	Main Vac valve closed
5/7/2010	8:11:10 AM	Bypass valve closed
5/7/2010	8:11:10 AM	Bubbler valve closed
5/7/2010	8:11:10 AM	Helium valve opened
5/7/2010	8:11:10 AM	Helium MFC set to  500.000000
5/7/2010	8:11:10 AM	H2 MFC set to  0.000000
5/7/2010	8:11:10 AM	BCl3 MFC set to  0.000000
5/7/2010	8:11:10 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:11:10 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:11:10 AM	Tube furnace set to 0
5/7/2010	8:12:32 AM	Helium valve closed
5/7/2010	8:12:32 AM	H2 valve closed
5/7/2010	8:12:32 AM	BCl3 valve closed
5/7/2010	8:12:32 AM	PH3 valve closed
5/7/2010	8:12:32 AM	SiCl4 pre valve closed
5/7/2010	8:12:32 AM	SiCl4 post valve closed
5/7/2010	8:12:32 AM	Main Vac valve closed
5/7/2010	8:12:32 AM	Bypass valve closed
5/7/2010	8:12:32 AM	Bubbler valve closed
5/7/2010	8:12:32 AM	Helium MFC set to  0.000000
5/7/2010	8:12:32 AM	H2 MFC set to  0.000000
5/7/2010	8:12:32 AM	BCl3 MFC set to  0.000000
5/7/2010	8:12:32 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:12:32 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:12:32 AM	Tube furnace set to 0
5/7/2010	8:12:47 AM	Helium valve closed
5/7/2010	8:12:47 AM	H2 valve closed
5/7/2010	8:12:47 AM	BCl3 valve closed
5/7/2010	8:12:47 AM	PH3 valve closed
5/7/2010	8:12:47 AM	SiCl4 pre valve closed
5/7/2010	8:12:47 AM	SiCl4 post valve closed
5/7/2010	8:12:47 AM	Main Vac valve closed
5/7/2010	8:12:47 AM	Bubbler valve closed
5/7/2010	8:12:47 AM	Bypass valve opened
5/7/2010	8:12:47 AM	Helium MFC set to  0.000000
5/7/2010	8:12:47 AM	H2 MFC set to  0.000000
5/7/2010	8:12:47 AM	BCl3 MFC set to  0.000000
5/7/2010	8:12:47 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:12:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:12:47 AM	Tube furnace set to 0
5/7/2010	8:13:18 AM	Helium valve closed
5/7/2010	8:13:18 AM	H2 valve closed
5/7/2010	8:13:18 AM	BCl3 valve closed
5/7/2010	8:13:18 AM	PH3 valve closed
5/7/2010	8:13:18 AM	SiCl4 pre valve closed
5/7/2010	8:13:18 AM	SiCl4 post valve closed
5/7/2010	8:13:18 AM	Bubbler valve closed
5/7/2010	8:13:18 AM	Main Vac valve opened
5/7/2010	8:13:18 AM	Bypass valve opened
5/7/2010	8:13:18 AM	Helium MFC set to  0.000000
5/7/2010	8:13:18 AM	H2 MFC set to  0.000000
5/7/2010	8:13:18 AM	BCl3 MFC set to  0.000000
5/7/2010	8:13:18 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:13:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:13:18 AM	Tube furnace set to 0
5/7/2010	8:18:18 AM	H2 valve closed
5/7/2010	8:18:18 AM	BCl3 valve closed
5/7/2010	8:18:18 AM	PH3 valve closed
5/7/2010	8:18:18 AM	SiCl4 pre valve closed
5/7/2010	8:18:18 AM	SiCl4 post valve closed
5/7/2010	8:18:18 AM	Main Vac valve closed
5/7/2010	8:18:18 AM	Bypass valve closed
5/7/2010	8:18:18 AM	Bubbler valve closed
5/7/2010	8:18:18 AM	Helium valve opened
5/7/2010	8:18:18 AM	Helium MFC set to  500.000000
5/7/2010	8:18:18 AM	H2 MFC set to  0.000000
5/7/2010	8:18:18 AM	BCl3 MFC set to  0.000000
5/7/2010	8:18:18 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:18:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:18:18 AM	Tube furnace set to 0
5/7/2010	8:19:40 AM	Helium valve closed
5/7/2010	8:19:40 AM	H2 valve closed
5/7/2010	8:19:40 AM	BCl3 valve closed
5/7/2010	8:19:40 AM	PH3 valve closed
5/7/2010	8:19:40 AM	SiCl4 pre valve closed
5/7/2010	8:19:40 AM	SiCl4 post valve closed
5/7/2010	8:19:40 AM	Main Vac valve closed
5/7/2010	8:19:40 AM	Bypass valve closed
5/7/2010	8:19:40 AM	Bubbler valve closed
5/7/2010	8:19:40 AM	Helium MFC set to  0.000000
5/7/2010	8:19:40 AM	H2 MFC set to  0.000000
5/7/2010	8:19:40 AM	BCl3 MFC set to  0.000000
5/7/2010	8:19:40 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:19:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:19:40 AM	Tube furnace set to 0
5/7/2010	8:19:55 AM	Helium valve closed
5/7/2010	8:19:55 AM	H2 valve closed
5/7/2010	8:19:55 AM	BCl3 valve closed
5/7/2010	8:19:55 AM	PH3 valve closed
5/7/2010	8:19:55 AM	SiCl4 pre valve closed
5/7/2010	8:19:55 AM	SiCl4 post valve closed
5/7/2010	8:19:55 AM	Main Vac valve closed
5/7/2010	8:19:55 AM	Bubbler valve closed
5/7/2010	8:19:55 AM	Bypass valve opened
5/7/2010	8:19:55 AM	Helium MFC set to  0.000000
5/7/2010	8:19:55 AM	H2 MFC set to  0.000000
5/7/2010	8:19:55 AM	BCl3 MFC set to  0.000000
5/7/2010	8:19:55 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:19:55 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:19:55 AM	Tube furnace set to 0
5/7/2010	8:20:25 AM	Helium valve closed
5/7/2010	8:20:25 AM	H2 valve closed
5/7/2010	8:20:25 AM	BCl3 valve closed
5/7/2010	8:20:25 AM	PH3 valve closed
5/7/2010	8:20:25 AM	SiCl4 pre valve closed
5/7/2010	8:20:25 AM	SiCl4 post valve closed
5/7/2010	8:20:25 AM	Bubbler valve closed
5/7/2010	8:20:25 AM	Main Vac valve opened
5/7/2010	8:20:25 AM	Bypass valve opened
5/7/2010	8:20:25 AM	Helium MFC set to  0.000000
5/7/2010	8:20:25 AM	H2 MFC set to  0.000000
5/7/2010	8:20:25 AM	BCl3 MFC set to  0.000000
5/7/2010	8:20:25 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:20:25 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:20:26 AM	Tube furnace set to 0
5/7/2010	8:21:36 AM	Helium valve closed
5/7/2010	8:21:36 AM	H2 valve closed
5/7/2010	8:21:36 AM	BCl3 valve closed
5/7/2010	8:21:36 AM	PH3 valve closed
5/7/2010	8:21:36 AM	SiCl4 pre valve closed
5/7/2010	8:21:36 AM	SiCl4 post valve closed
5/7/2010	8:21:36 AM	Bubbler valve closed
5/7/2010	8:21:36 AM	Main Vac valve opened
5/7/2010	8:21:36 AM	Bypass valve opened
5/7/2010	8:21:36 AM	Helium MFC set to  0.000000
5/7/2010	8:21:36 AM	H2 MFC set to  0.000000
5/7/2010	8:21:36 AM	BCl3 MFC set to  0.000000
5/7/2010	8:21:36 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:21:36 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:21:36 AM	Tube furnace set to 0
5/7/2010	8:21:37 AM	Run finished at 8:21 AM
5/7/2010	8:21:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/7/2010	8:23:05 AM	Recipe started at 8:23 AM
5/7/2010	8:23:05 AM	Helium valve closed
5/7/2010	8:23:05 AM	BCl3 valve closed
5/7/2010	8:23:05 AM	PH3 valve closed
5/7/2010	8:23:05 AM	SiCl4 pre valve closed
5/7/2010	8:23:05 AM	SiCl4 post valve closed
5/7/2010	8:23:05 AM	Main Vac valve closed
5/7/2010	8:23:05 AM	Bypass valve closed
5/7/2010	8:23:05 AM	Bubbler valve closed
5/7/2010	8:23:05 AM	H2 valve opened
5/7/2010	8:23:05 AM	Helium MFC set to  0.000000
5/7/2010	8:23:05 AM	H2 MFC set to  500.000000
5/7/2010	8:23:05 AM	BCl3 MFC set to  0.000000
5/7/2010	8:23:05 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:23:05 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:23:05 AM	Tube furnace set to 0
5/7/2010	8:24:27 AM	Helium valve closed
5/7/2010	8:24:27 AM	BCl3 valve closed
5/7/2010	8:24:27 AM	PH3 valve closed
5/7/2010	8:24:27 AM	SiCl4 pre valve closed
5/7/2010	8:24:27 AM	SiCl4 post valve closed
5/7/2010	8:24:27 AM	Main Vac valve closed
5/7/2010	8:24:27 AM	Bypass valve closed
5/7/2010	8:24:27 AM	H2 valve opened
5/7/2010	8:24:27 AM	Bubbler valve opened
5/7/2010	8:24:27 AM	Helium MFC set to  0.000000
5/7/2010	8:24:27 AM	H2 MFC set to  500.000000
5/7/2010	8:24:27 AM	BCl3 MFC set to  0.000000
5/7/2010	8:24:27 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:24:27 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:24:27 AM	Tube furnace set to 1000
5/7/2010	8:24:40 AM	Run aborted at 8:24 AM
5/7/2010	8:24:40 AM	Helium valve closed
5/7/2010	8:24:40 AM	H2 valve closed
5/7/2010	8:24:40 AM	BCl3 valve closed
5/7/2010	8:24:40 AM	PH3 valve closed
5/7/2010	8:24:40 AM	SiCl4 pre valve closed
5/7/2010	8:24:40 AM	SiCl4 post valve closed
5/7/2010	8:24:40 AM	Bypass valve closed
5/7/2010	8:24:40 AM	Main Vac valve closed
5/7/2010	8:24:40 AM	Bubbler valve closed
5/7/2010	8:24:40 AM	Helium MFC set to  0.000000
5/7/2010	8:24:40 AM	H2 MFC set to  0.000000
5/7/2010	8:24:40 AM	BCl3 MFC set to  0.000000
5/7/2010	8:24:40 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:24:40 AM	Tube furnace set to 0
5/7/2010	8:24:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	8:24:54 AM	Recipe started at 8:24 AM
5/7/2010	8:24:54 AM	Helium valve closed
5/7/2010	8:24:54 AM	H2 valve closed
5/7/2010	8:24:54 AM	BCl3 valve closed
5/7/2010	8:24:54 AM	PH3 valve closed
5/7/2010	8:24:54 AM	SiCl4 pre valve closed
5/7/2010	8:24:54 AM	SiCl4 post valve closed
5/7/2010	8:24:54 AM	Main Vac valve closed
5/7/2010	8:24:54 AM	Bubbler valve closed
5/7/2010	8:24:54 AM	Bypass valve opened
5/7/2010	8:24:54 AM	Helium MFC set to  0.000000
5/7/2010	8:24:54 AM	H2 MFC set to  0.000000
5/7/2010	8:24:54 AM	BCl3 MFC set to  0.000000
5/7/2010	8:24:54 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:24:54 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:24:55 AM	Tube furnace set to 0
5/7/2010	8:25:13 AM	Helium valve closed
5/7/2010	8:25:13 AM	H2 valve closed
5/7/2010	8:25:13 AM	BCl3 valve closed
5/7/2010	8:25:13 AM	PH3 valve closed
5/7/2010	8:25:13 AM	SiCl4 pre valve closed
5/7/2010	8:25:13 AM	SiCl4 post valve closed
5/7/2010	8:25:13 AM	Bubbler valve closed
5/7/2010	8:25:13 AM	Main Vac valve opened
5/7/2010	8:25:13 AM	Bypass valve opened
5/7/2010	8:25:13 AM	Helium MFC set to  0.000000
5/7/2010	8:25:13 AM	H2 MFC set to  0.000000
5/7/2010	8:25:13 AM	BCl3 MFC set to  0.000000
5/7/2010	8:25:13 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:25:13 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:25:13 AM	Tube furnace set to 0
5/7/2010	8:25:13 AM	Run finished at 8:25 AM
5/7/2010	8:25:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	8:25:55 AM	Bypass valve closed
5/7/2010	8:25:55 AM	Main Vac valve closed
5/7/2010	8:26:12 AM	Bypass valve opened
5/7/2010	8:26:13 AM	Main Vac valve opened
5/7/2010	8:26:39 AM	Recipe started at 8:26 AM
5/7/2010	8:26:39 AM	Helium valve closed
5/7/2010	8:26:39 AM	BCl3 valve closed
5/7/2010	8:26:39 AM	PH3 valve closed
5/7/2010	8:26:39 AM	SiCl4 pre valve closed
5/7/2010	8:26:39 AM	SiCl4 post valve closed
5/7/2010	8:26:39 AM	Main Vac valve closed
5/7/2010	8:26:39 AM	Bypass valve closed
5/7/2010	8:26:39 AM	Bubbler valve closed
5/7/2010	8:26:39 AM	H2 valve opened
5/7/2010	8:26:39 AM	Helium MFC set to  0.000000
5/7/2010	8:26:39 AM	H2 MFC set to  500.000000
5/7/2010	8:26:39 AM	BCl3 MFC set to  0.000000
5/7/2010	8:26:39 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:26:39 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:26:39 AM	Tube furnace set to 0
5/7/2010	8:28:00 AM	Helium valve closed
5/7/2010	8:28:00 AM	BCl3 valve closed
5/7/2010	8:28:00 AM	PH3 valve closed
5/7/2010	8:28:00 AM	SiCl4 pre valve closed
5/7/2010	8:28:00 AM	SiCl4 post valve closed
5/7/2010	8:28:00 AM	Main Vac valve closed
5/7/2010	8:28:00 AM	Bypass valve closed
5/7/2010	8:28:00 AM	H2 valve opened
5/7/2010	8:28:00 AM	Bubbler valve opened
5/7/2010	8:28:00 AM	Helium MFC set to  0.000000
5/7/2010	8:28:00 AM	H2 MFC set to  500.000000
5/7/2010	8:28:00 AM	BCl3 MFC set to  0.000000
5/7/2010	8:28:00 AM	SiCl4 MFC set to  0.000000
5/7/2010	8:28:00 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:28:00 AM	Tube furnace set to 1000
5/7/2010	8:48:00 AM	Helium valve closed
5/7/2010	8:48:00 AM	PH3 valve closed
5/7/2010	8:48:00 AM	Main Vac valve closed
5/7/2010	8:48:00 AM	Bypass valve closed
5/7/2010	8:48:00 AM	H2 valve opened
5/7/2010	8:48:00 AM	BCl3 valve opened
5/7/2010	8:48:00 AM	SiCl4 pre valve opened
5/7/2010	8:48:00 AM	SiCl4 post valve opened
5/7/2010	8:48:00 AM	Bubbler valve opened
5/7/2010	8:48:00 AM	Helium MFC set to  0.000000
5/7/2010	8:48:00 AM	H2 MFC set to  500.000000
5/7/2010	8:48:00 AM	BCl3 MFC set to  35.000000
5/7/2010	8:48:00 AM	SiCl4 MFC set to  325.000000
5/7/2010	8:48:00 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	8:48:01 AM	Tube furnace set to 1000
5/7/2010	9:03:01 AM	H2 valve closed
5/7/2010	9:03:01 AM	BCl3 valve closed
5/7/2010	9:03:01 AM	PH3 valve closed
5/7/2010	9:03:01 AM	SiCl4 pre valve closed
5/7/2010	9:03:01 AM	SiCl4 post valve closed
5/7/2010	9:03:01 AM	Main Vac valve closed
5/7/2010	9:03:01 AM	Bypass valve closed
5/7/2010	9:03:01 AM	Helium valve opened
5/7/2010	9:03:01 AM	Bubbler valve opened
5/7/2010	9:03:01 AM	Helium MFC set to  500.000000
5/7/2010	9:03:01 AM	H2 MFC set to  0.000000
5/7/2010	9:03:01 AM	BCl3 MFC set to  0.000000
5/7/2010	9:03:01 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:03:01 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:03:01 AM	Tube furnace set to 0
5/7/2010	9:14:26 AM	Helium valve closed
5/7/2010	9:14:26 AM	H2 valve closed
5/7/2010	9:14:26 AM	BCl3 valve closed
5/7/2010	9:14:26 AM	PH3 valve closed
5/7/2010	9:14:26 AM	SiCl4 pre valve closed
5/7/2010	9:14:26 AM	SiCl4 post valve closed
5/7/2010	9:14:26 AM	Main Vac valve closed
5/7/2010	9:14:26 AM	Bypass valve closed
5/7/2010	9:14:26 AM	Bubbler valve closed
5/7/2010	9:14:26 AM	Helium MFC set to  0.000000
5/7/2010	9:14:26 AM	H2 MFC set to  0.000000
5/7/2010	9:14:26 AM	BCl3 MFC set to  0.000000
5/7/2010	9:14:26 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:14:26 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:14:26 AM	Tube furnace set to 0
5/7/2010	9:14:26 AM	Run finished at 9:14 AM
5/7/2010	9:14:39 AM	Recipe started at 9:14 AM
5/7/2010	9:14:39 AM	Helium valve closed
5/7/2010	9:14:39 AM	BCl3 valve closed
5/7/2010	9:14:39 AM	PH3 valve closed
5/7/2010	9:14:39 AM	SiCl4 pre valve closed
5/7/2010	9:14:39 AM	SiCl4 post valve closed
5/7/2010	9:14:39 AM	Main Vac valve closed
5/7/2010	9:14:39 AM	Bypass valve closed
5/7/2010	9:14:39 AM	Bubbler valve closed
5/7/2010	9:14:39 AM	H2 valve opened
5/7/2010	9:14:39 AM	Helium MFC set to  0.000000
5/7/2010	9:14:39 AM	H2 MFC set to  500.000000
5/7/2010	9:14:39 AM	BCl3 MFC set to  0.000000
5/7/2010	9:14:39 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:14:39 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:14:39 AM	Tube furnace set to 0
5/7/2010	9:14:40 AM	Helium valve closed
5/7/2010	9:14:40 AM	BCl3 valve closed
5/7/2010	9:14:40 AM	PH3 valve closed
5/7/2010	9:14:40 AM	SiCl4 pre valve closed
5/7/2010	9:14:40 AM	SiCl4 post valve closed
5/7/2010	9:14:40 AM	Main Vac valve closed
5/7/2010	9:14:40 AM	Bypass valve closed
5/7/2010	9:14:40 AM	H2 valve opened
5/7/2010	9:14:40 AM	Bubbler valve opened
5/7/2010	9:14:40 AM	Helium MFC set to  0.000000
5/7/2010	9:14:40 AM	H2 MFC set to  500.000000
5/7/2010	9:14:40 AM	BCl3 MFC set to  0.000000
5/7/2010	9:14:40 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:14:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:14:41 AM	Tube furnace set to 1000
5/7/2010	9:14:56 AM	Run aborted at 9:14 AM
5/7/2010	9:14:56 AM	Helium valve closed
5/7/2010	9:14:56 AM	H2 valve closed
5/7/2010	9:14:56 AM	BCl3 valve closed
5/7/2010	9:14:56 AM	PH3 valve closed
5/7/2010	9:14:56 AM	SiCl4 pre valve closed
5/7/2010	9:14:56 AM	SiCl4 post valve closed
5/7/2010	9:14:56 AM	Bypass valve closed
5/7/2010	9:14:56 AM	Main Vac valve closed
5/7/2010	9:14:56 AM	Bubbler valve closed
5/7/2010	9:14:56 AM	Helium MFC set to  0.000000
5/7/2010	9:14:56 AM	H2 MFC set to  0.000000
5/7/2010	9:14:56 AM	BCl3 MFC set to  0.000000
5/7/2010	9:14:56 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:14:56 AM	Tube furnace set to 0
5/7/2010	9:14:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2010	9:14:59 AM	Recipe started at 9:14 AM
5/7/2010	9:14:59 AM	H2 valve closed
5/7/2010	9:14:59 AM	BCl3 valve closed
5/7/2010	9:14:59 AM	PH3 valve closed
5/7/2010	9:14:59 AM	SiCl4 pre valve closed
5/7/2010	9:14:59 AM	SiCl4 post valve closed
5/7/2010	9:14:59 AM	Main Vac valve closed
5/7/2010	9:14:59 AM	Bypass valve closed
5/7/2010	9:14:59 AM	Bubbler valve closed
5/7/2010	9:14:59 AM	Helium valve opened
5/7/2010	9:14:59 AM	Helium MFC set to  500.000000
5/7/2010	9:14:59 AM	H2 MFC set to  0.000000
5/7/2010	9:14:59 AM	BCl3 MFC set to  0.000000
5/7/2010	9:14:59 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:14:59 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:14:59 AM	Tube furnace set to 0
5/7/2010	9:14:59 AM	Helium valve closed
5/7/2010	9:14:59 AM	H2 valve closed
5/7/2010	9:14:59 AM	BCl3 valve closed
5/7/2010	9:14:59 AM	PH3 valve closed
5/7/2010	9:14:59 AM	SiCl4 pre valve closed
5/7/2010	9:14:59 AM	SiCl4 post valve closed
5/7/2010	9:14:59 AM	Main Vac valve closed
5/7/2010	9:14:59 AM	Bypass valve closed
5/7/2010	9:14:59 AM	Bubbler valve closed
5/7/2010	9:14:59 AM	Helium MFC set to  0.000000
5/7/2010	9:14:59 AM	H2 MFC set to  0.000000
5/7/2010	9:14:59 AM	BCl3 MFC set to  0.000000
5/7/2010	9:14:59 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:14:59 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:14:59 AM	Tube furnace set to 0
5/7/2010	9:14:59 AM	Run finished at 9:14 AM
5/7/2010	9:14:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2010	9:15:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	9:15:08 AM	Recipe started at 9:15 AM
5/7/2010	9:15:08 AM	Helium valve closed
5/7/2010	9:15:08 AM	H2 valve closed
5/7/2010	9:15:08 AM	BCl3 valve closed
5/7/2010	9:15:08 AM	PH3 valve closed
5/7/2010	9:15:08 AM	SiCl4 pre valve closed
5/7/2010	9:15:08 AM	SiCl4 post valve closed
5/7/2010	9:15:08 AM	Main Vac valve closed
5/7/2010	9:15:08 AM	Bubbler valve closed
5/7/2010	9:15:08 AM	Bypass valve opened
5/7/2010	9:15:08 AM	Helium MFC set to  0.000000
5/7/2010	9:15:08 AM	H2 MFC set to  0.000000
5/7/2010	9:15:08 AM	BCl3 MFC set to  0.000000
5/7/2010	9:15:08 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:15:08 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:15:08 AM	Tube furnace set to 0
5/7/2010	9:15:33 AM	Helium valve closed
5/7/2010	9:15:33 AM	H2 valve closed
5/7/2010	9:15:33 AM	BCl3 valve closed
5/7/2010	9:15:33 AM	PH3 valve closed
5/7/2010	9:15:33 AM	SiCl4 pre valve closed
5/7/2010	9:15:33 AM	SiCl4 post valve closed
5/7/2010	9:15:33 AM	Bubbler valve closed
5/7/2010	9:15:33 AM	Main Vac valve opened
5/7/2010	9:15:33 AM	Bypass valve opened
5/7/2010	9:15:33 AM	Helium MFC set to  0.000000
5/7/2010	9:15:33 AM	H2 MFC set to  0.000000
5/7/2010	9:15:33 AM	BCl3 MFC set to  0.000000
5/7/2010	9:15:33 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:15:33 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:15:33 AM	Tube furnace set to 0
5/7/2010	9:15:33 AM	Run finished at 9:15 AM
5/7/2010	9:15:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	9:16:04 AM	Recipe started at 9:16 AM
5/7/2010	9:16:04 AM	Helium valve closed
5/7/2010	9:16:04 AM	BCl3 valve closed
5/7/2010	9:16:04 AM	PH3 valve closed
5/7/2010	9:16:04 AM	SiCl4 pre valve closed
5/7/2010	9:16:04 AM	SiCl4 post valve closed
5/7/2010	9:16:04 AM	Main Vac valve closed
5/7/2010	9:16:04 AM	Bypass valve closed
5/7/2010	9:16:04 AM	Bubbler valve closed
5/7/2010	9:16:04 AM	H2 valve opened
5/7/2010	9:16:04 AM	Helium MFC set to  0.000000
5/7/2010	9:16:04 AM	H2 MFC set to  500.000000
5/7/2010	9:16:04 AM	BCl3 MFC set to  0.000000
5/7/2010	9:16:04 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:16:04 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:16:05 AM	Tube furnace set to 0
5/7/2010	9:17:21 AM	Helium valve closed
5/7/2010	9:17:21 AM	BCl3 valve closed
5/7/2010	9:17:21 AM	PH3 valve closed
5/7/2010	9:17:21 AM	SiCl4 pre valve closed
5/7/2010	9:17:21 AM	SiCl4 post valve closed
5/7/2010	9:17:21 AM	Main Vac valve closed
5/7/2010	9:17:21 AM	Bypass valve closed
5/7/2010	9:17:21 AM	H2 valve opened
5/7/2010	9:17:21 AM	Bubbler valve opened
5/7/2010	9:17:21 AM	Helium MFC set to  0.000000
5/7/2010	9:17:21 AM	H2 MFC set to  500.000000
5/7/2010	9:17:21 AM	BCl3 MFC set to  0.000000
5/7/2010	9:17:21 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:17:21 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:17:21 AM	Tube furnace set to 1000
5/7/2010	9:37:21 AM	Helium valve closed
5/7/2010	9:37:21 AM	PH3 valve closed
5/7/2010	9:37:21 AM	Main Vac valve closed
5/7/2010	9:37:21 AM	Bypass valve closed
5/7/2010	9:37:21 AM	H2 valve opened
5/7/2010	9:37:21 AM	BCl3 valve opened
5/7/2010	9:37:21 AM	SiCl4 pre valve opened
5/7/2010	9:37:21 AM	SiCl4 post valve opened
5/7/2010	9:37:21 AM	Bubbler valve opened
5/7/2010	9:37:21 AM	Helium MFC set to  0.000000
5/7/2010	9:37:21 AM	H2 MFC set to  500.000000
5/7/2010	9:37:21 AM	BCl3 MFC set to  35.000000
5/7/2010	9:37:21 AM	SiCl4 MFC set to  325.000000
5/7/2010	9:37:21 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:37:21 AM	Tube furnace set to 1000
5/7/2010	9:52:21 AM	H2 valve closed
5/7/2010	9:52:21 AM	BCl3 valve closed
5/7/2010	9:52:21 AM	PH3 valve closed
5/7/2010	9:52:21 AM	SiCl4 pre valve closed
5/7/2010	9:52:21 AM	SiCl4 post valve closed
5/7/2010	9:52:21 AM	Main Vac valve closed
5/7/2010	9:52:21 AM	Bypass valve closed
5/7/2010	9:52:21 AM	Helium valve opened
5/7/2010	9:52:21 AM	Bubbler valve opened
5/7/2010	9:52:21 AM	Helium MFC set to  500.000000
5/7/2010	9:52:21 AM	H2 MFC set to  0.000000
5/7/2010	9:52:21 AM	BCl3 MFC set to  0.000000
5/7/2010	9:52:21 AM	SiCl4 MFC set to  0.000000
5/7/2010	9:52:21 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	9:52:22 AM	Tube furnace set to 0
5/7/2010	10:01:33 AM	Helium valve closed
5/7/2010	10:01:33 AM	H2 valve closed
5/7/2010	10:01:33 AM	BCl3 valve closed
5/7/2010	10:01:33 AM	PH3 valve closed
5/7/2010	10:01:33 AM	SiCl4 pre valve closed
5/7/2010	10:01:33 AM	SiCl4 post valve closed
5/7/2010	10:01:33 AM	Main Vac valve closed
5/7/2010	10:01:33 AM	Bypass valve closed
5/7/2010	10:01:33 AM	Bubbler valve closed
5/7/2010	10:01:33 AM	Helium MFC set to  0.000000
5/7/2010	10:01:33 AM	H2 MFC set to  0.000000
5/7/2010	10:01:33 AM	BCl3 MFC set to  0.000000
5/7/2010	10:01:33 AM	SiCl4 MFC set to  0.000000
5/7/2010	10:01:33 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:01:34 AM	Tube furnace set to 0
5/7/2010	10:01:34 AM	Run finished at 10:01 AM
5/7/2010	10:01:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	10:01:40 AM	Recipe started at 10:01 AM
5/7/2010	10:01:40 AM	Helium valve closed
5/7/2010	10:01:40 AM	H2 valve closed
5/7/2010	10:01:40 AM	BCl3 valve closed
5/7/2010	10:01:40 AM	PH3 valve closed
5/7/2010	10:01:40 AM	SiCl4 pre valve closed
5/7/2010	10:01:40 AM	SiCl4 post valve closed
5/7/2010	10:01:40 AM	Main Vac valve closed
5/7/2010	10:01:40 AM	Bubbler valve closed
5/7/2010	10:01:40 AM	Bypass valve opened
5/7/2010	10:01:40 AM	Helium MFC set to  0.000000
5/7/2010	10:01:40 AM	H2 MFC set to  0.000000
5/7/2010	10:01:40 AM	BCl3 MFC set to  0.000000
5/7/2010	10:01:40 AM	SiCl4 MFC set to  0.000000
5/7/2010	10:01:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:01:40 AM	Tube furnace set to 0
5/7/2010	10:02:10 AM	Helium valve closed
5/7/2010	10:02:10 AM	H2 valve closed
5/7/2010	10:02:10 AM	BCl3 valve closed
5/7/2010	10:02:10 AM	PH3 valve closed
5/7/2010	10:02:10 AM	SiCl4 pre valve closed
5/7/2010	10:02:10 AM	SiCl4 post valve closed
5/7/2010	10:02:10 AM	Bubbler valve closed
5/7/2010	10:02:10 AM	Main Vac valve opened
5/7/2010	10:02:10 AM	Bypass valve opened
5/7/2010	10:02:10 AM	Helium MFC set to  0.000000
5/7/2010	10:02:10 AM	H2 MFC set to  0.000000
5/7/2010	10:02:10 AM	BCl3 MFC set to  0.000000
5/7/2010	10:02:10 AM	SiCl4 MFC set to  0.000000
5/7/2010	10:02:10 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:02:10 AM	Tube furnace set to 0
5/7/2010	10:02:10 AM	Run finished at 10:02 AM
5/7/2010	10:02:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	10:03:11 AM	Recipe started at 10:03 AM
5/7/2010	10:03:11 AM	Helium valve closed
5/7/2010	10:03:11 AM	BCl3 valve closed
5/7/2010	10:03:11 AM	PH3 valve closed
5/7/2010	10:03:11 AM	SiCl4 pre valve closed
5/7/2010	10:03:11 AM	SiCl4 post valve closed
5/7/2010	10:03:11 AM	Main Vac valve closed
5/7/2010	10:03:11 AM	Bypass valve closed
5/7/2010	10:03:11 AM	Bubbler valve closed
5/7/2010	10:03:11 AM	H2 valve opened
5/7/2010	10:03:11 AM	Helium MFC set to  0.000000
5/7/2010	10:03:11 AM	H2 MFC set to  500.000000
5/7/2010	10:03:11 AM	BCl3 MFC set to  0.000000
5/7/2010	10:03:11 AM	SiCl4 MFC set to  0.000000
5/7/2010	10:03:11 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:03:11 AM	Tube furnace set to 0
5/7/2010	10:04:27 AM	Helium valve closed
5/7/2010	10:04:27 AM	BCl3 valve closed
5/7/2010	10:04:27 AM	PH3 valve closed
5/7/2010	10:04:27 AM	SiCl4 pre valve closed
5/7/2010	10:04:27 AM	SiCl4 post valve closed
5/7/2010	10:04:27 AM	Main Vac valve closed
5/7/2010	10:04:27 AM	Bypass valve closed
5/7/2010	10:04:27 AM	H2 valve opened
5/7/2010	10:04:27 AM	Bubbler valve opened
5/7/2010	10:04:27 AM	Helium MFC set to  0.000000
5/7/2010	10:04:27 AM	H2 MFC set to  500.000000
5/7/2010	10:04:27 AM	BCl3 MFC set to  0.000000
5/7/2010	10:04:27 AM	SiCl4 MFC set to  0.000000
5/7/2010	10:04:27 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:04:27 AM	Tube furnace set to 1000
5/7/2010	10:24:27 AM	Helium valve closed
5/7/2010	10:24:27 AM	PH3 valve closed
5/7/2010	10:24:27 AM	Main Vac valve closed
5/7/2010	10:24:27 AM	Bypass valve closed
5/7/2010	10:24:27 AM	H2 valve opened
5/7/2010	10:24:27 AM	BCl3 valve opened
5/7/2010	10:24:27 AM	SiCl4 pre valve opened
5/7/2010	10:24:27 AM	SiCl4 post valve opened
5/7/2010	10:24:27 AM	Bubbler valve opened
5/7/2010	10:24:27 AM	Helium MFC set to  0.000000
5/7/2010	10:24:27 AM	H2 MFC set to  500.000000
5/7/2010	10:24:27 AM	BCl3 MFC set to  35.000000
5/7/2010	10:24:27 AM	SiCl4 MFC set to  325.000000
5/7/2010	10:24:27 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:24:27 AM	Tube furnace set to 1000
5/7/2010	10:39:27 AM	H2 valve closed
5/7/2010	10:39:27 AM	BCl3 valve closed
5/7/2010	10:39:27 AM	PH3 valve closed
5/7/2010	10:39:27 AM	SiCl4 pre valve closed
5/7/2010	10:39:27 AM	SiCl4 post valve closed
5/7/2010	10:39:27 AM	Main Vac valve closed
5/7/2010	10:39:27 AM	Bypass valve closed
5/7/2010	10:39:27 AM	Helium valve opened
5/7/2010	10:39:27 AM	Bubbler valve opened
5/7/2010	10:39:27 AM	Helium MFC set to  500.000000
5/7/2010	10:39:27 AM	H2 MFC set to  0.000000
5/7/2010	10:39:27 AM	BCl3 MFC set to  0.000000
5/7/2010	10:39:27 AM	SiCl4 MFC set to  0.000000
5/7/2010	10:39:27 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:39:28 AM	Tube furnace set to 0
5/7/2010	10:59:27 AM	Helium valve closed
5/7/2010	10:59:27 AM	H2 valve closed
5/7/2010	10:59:27 AM	BCl3 valve closed
5/7/2010	10:59:27 AM	PH3 valve closed
5/7/2010	10:59:28 AM	SiCl4 pre valve closed
5/7/2010	10:59:28 AM	SiCl4 post valve closed
5/7/2010	10:59:28 AM	Main Vac valve closed
5/7/2010	10:59:28 AM	Bypass valve closed
5/7/2010	10:59:28 AM	Bubbler valve closed
5/7/2010	10:59:28 AM	Helium MFC set to  0.000000
5/7/2010	10:59:28 AM	H2 MFC set to  0.000000
5/7/2010	10:59:28 AM	BCl3 MFC set to  0.000000
5/7/2010	10:59:28 AM	SiCl4 MFC set to  0.000000
5/7/2010	10:59:28 AM	Bypass solenoid MFC set to  0.000000
5/7/2010	10:59:28 AM	Tube furnace set to 0
5/7/2010	10:59:28 AM	Run finished at 10:59 AM
5/7/2010	12:09:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	12:09:47 PM	Recipe started at 12:09 PM
5/7/2010	12:09:47 PM	Helium valve closed
5/7/2010	12:09:47 PM	H2 valve closed
5/7/2010	12:09:47 PM	BCl3 valve closed
5/7/2010	12:09:47 PM	PH3 valve closed
5/7/2010	12:09:47 PM	SiCl4 pre valve closed
5/7/2010	12:09:47 PM	SiCl4 post valve closed
5/7/2010	12:09:47 PM	Main Vac valve closed
5/7/2010	12:09:47 PM	Bubbler valve closed
5/7/2010	12:09:47 PM	Bypass valve opened
5/7/2010	12:09:47 PM	Helium MFC set to  0.000000
5/7/2010	12:09:47 PM	H2 MFC set to  0.000000
5/7/2010	12:09:47 PM	BCl3 MFC set to  0.000000
5/7/2010	12:09:47 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:09:47 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:09:47 PM	Tube furnace set to 0
5/7/2010	12:10:18 PM	Helium valve closed
5/7/2010	12:10:18 PM	H2 valve closed
5/7/2010	12:10:18 PM	BCl3 valve closed
5/7/2010	12:10:18 PM	PH3 valve closed
5/7/2010	12:10:18 PM	SiCl4 pre valve closed
5/7/2010	12:10:18 PM	SiCl4 post valve closed
5/7/2010	12:10:18 PM	Bubbler valve closed
5/7/2010	12:10:18 PM	Main Vac valve opened
5/7/2010	12:10:18 PM	Bypass valve opened
5/7/2010	12:10:18 PM	Helium MFC set to  0.000000
5/7/2010	12:10:18 PM	H2 MFC set to  0.000000
5/7/2010	12:10:18 PM	BCl3 MFC set to  0.000000
5/7/2010	12:10:18 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:10:18 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:10:18 PM	Tube furnace set to 0
5/7/2010	12:10:18 PM	Run finished at 12:10 PM
5/7/2010	12:10:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	12:12:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2010	12:12:20 PM	Recipe started at 12:12 PM
5/7/2010	12:12:20 PM	H2 valve closed
5/7/2010	12:12:20 PM	BCl3 valve closed
5/7/2010	12:12:20 PM	PH3 valve closed
5/7/2010	12:12:20 PM	SiCl4 pre valve closed
5/7/2010	12:12:20 PM	SiCl4 post valve closed
5/7/2010	12:12:20 PM	Main Vac valve closed
5/7/2010	12:12:20 PM	Bypass valve closed
5/7/2010	12:12:20 PM	Bubbler valve closed
5/7/2010	12:12:20 PM	Helium valve opened
5/7/2010	12:12:20 PM	Helium MFC set to  500.000000
5/7/2010	12:12:20 PM	H2 MFC set to  0.000000
5/7/2010	12:12:20 PM	BCl3 MFC set to  0.000000
5/7/2010	12:12:20 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:12:20 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:12:20 PM	Tube furnace set to 0
5/7/2010	12:13:39 PM	Helium valve closed
5/7/2010	12:13:39 PM	H2 valve closed
5/7/2010	12:13:39 PM	BCl3 valve closed
5/7/2010	12:13:39 PM	PH3 valve closed
5/7/2010	12:13:39 PM	SiCl4 pre valve closed
5/7/2010	12:13:39 PM	SiCl4 post valve closed
5/7/2010	12:13:39 PM	Main Vac valve closed
5/7/2010	12:13:39 PM	Bypass valve closed
5/7/2010	12:13:39 PM	Bubbler valve closed
5/7/2010	12:13:39 PM	Helium MFC set to  0.000000
5/7/2010	12:13:39 PM	H2 MFC set to  0.000000
5/7/2010	12:13:39 PM	BCl3 MFC set to  0.000000
5/7/2010	12:13:39 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:13:39 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:13:39 PM	Tube furnace set to 0
5/7/2010	12:13:40 PM	Run finished at 12:13 PM
5/7/2010	12:13:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2010	12:27:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	12:27:56 PM	Recipe started at 12:27 PM
5/7/2010	12:27:56 PM	Helium valve closed
5/7/2010	12:27:56 PM	H2 valve closed
5/7/2010	12:27:56 PM	BCl3 valve closed
5/7/2010	12:27:56 PM	PH3 valve closed
5/7/2010	12:27:56 PM	SiCl4 pre valve closed
5/7/2010	12:27:56 PM	SiCl4 post valve closed
5/7/2010	12:27:56 PM	Main Vac valve closed
5/7/2010	12:27:56 PM	Bubbler valve closed
5/7/2010	12:27:56 PM	Bypass valve opened
5/7/2010	12:27:56 PM	Helium MFC set to  0.000000
5/7/2010	12:27:56 PM	H2 MFC set to  0.000000
5/7/2010	12:27:56 PM	BCl3 MFC set to  0.000000
5/7/2010	12:27:56 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:27:56 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:27:56 PM	Tube furnace set to 0
5/7/2010	12:28:38 PM	Helium valve closed
5/7/2010	12:28:38 PM	H2 valve closed
5/7/2010	12:28:38 PM	BCl3 valve closed
5/7/2010	12:28:38 PM	PH3 valve closed
5/7/2010	12:28:38 PM	SiCl4 pre valve closed
5/7/2010	12:28:38 PM	SiCl4 post valve closed
5/7/2010	12:28:38 PM	Bubbler valve closed
5/7/2010	12:28:38 PM	Main Vac valve opened
5/7/2010	12:28:38 PM	Bypass valve opened
5/7/2010	12:28:38 PM	Helium MFC set to  0.000000
5/7/2010	12:28:38 PM	H2 MFC set to  0.000000
5/7/2010	12:28:38 PM	BCl3 MFC set to  0.000000
5/7/2010	12:28:38 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:28:38 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:28:38 PM	Tube furnace set to 0
5/7/2010	12:28:38 PM	Run finished at 12:28 PM
5/7/2010	12:28:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2010	12:30:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/7/2010	12:30:14 PM	Recipe started at 12:30 PM
5/7/2010	12:30:14 PM	H2 valve closed
5/7/2010	12:30:14 PM	BCl3 valve closed
5/7/2010	12:30:14 PM	PH3 valve closed
5/7/2010	12:30:14 PM	SiCl4 pre valve closed
5/7/2010	12:30:14 PM	SiCl4 post valve closed
5/7/2010	12:30:14 PM	Main Vac valve closed
5/7/2010	12:30:14 PM	Bypass valve closed
5/7/2010	12:30:14 PM	Bubbler valve closed
5/7/2010	12:30:14 PM	Helium valve opened
5/7/2010	12:30:14 PM	Helium MFC set to  500.000000
5/7/2010	12:30:14 PM	H2 MFC set to  0.000000
5/7/2010	12:30:14 PM	BCl3 MFC set to  0.000000
5/7/2010	12:30:14 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:30:14 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:30:14 PM	Tube furnace set to 0
5/7/2010	12:31:36 PM	Helium valve closed
5/7/2010	12:31:36 PM	H2 valve closed
5/7/2010	12:31:36 PM	BCl3 valve closed
5/7/2010	12:31:36 PM	PH3 valve closed
5/7/2010	12:31:36 PM	SiCl4 pre valve closed
5/7/2010	12:31:36 PM	SiCl4 post valve closed
5/7/2010	12:31:36 PM	Main Vac valve closed
5/7/2010	12:31:36 PM	Bypass valve closed
5/7/2010	12:31:36 PM	Bubbler valve closed
5/7/2010	12:31:36 PM	Helium MFC set to  0.000000
5/7/2010	12:31:36 PM	H2 MFC set to  0.000000
5/7/2010	12:31:36 PM	BCl3 MFC set to  0.000000
5/7/2010	12:31:36 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:31:36 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:31:36 PM	Tube furnace set to 0
5/7/2010	12:31:51 PM	Helium valve closed
5/7/2010	12:31:51 PM	H2 valve closed
5/7/2010	12:31:51 PM	BCl3 valve closed
5/7/2010	12:31:51 PM	PH3 valve closed
5/7/2010	12:31:51 PM	SiCl4 pre valve closed
5/7/2010	12:31:51 PM	SiCl4 post valve closed
5/7/2010	12:31:51 PM	Main Vac valve closed
5/7/2010	12:31:51 PM	Bubbler valve closed
5/7/2010	12:31:51 PM	Bypass valve opened
5/7/2010	12:31:51 PM	Helium MFC set to  0.000000
5/7/2010	12:31:51 PM	H2 MFC set to  0.000000
5/7/2010	12:31:51 PM	BCl3 MFC set to  0.000000
5/7/2010	12:31:51 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:31:51 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:31:51 PM	Tube furnace set to 0
5/7/2010	12:32:21 PM	Helium valve closed
5/7/2010	12:32:21 PM	H2 valve closed
5/7/2010	12:32:21 PM	BCl3 valve closed
5/7/2010	12:32:21 PM	PH3 valve closed
5/7/2010	12:32:21 PM	SiCl4 pre valve closed
5/7/2010	12:32:21 PM	SiCl4 post valve closed
5/7/2010	12:32:21 PM	Bubbler valve closed
5/7/2010	12:32:21 PM	Main Vac valve opened
5/7/2010	12:32:21 PM	Bypass valve opened
5/7/2010	12:32:21 PM	Helium MFC set to  0.000000
5/7/2010	12:32:21 PM	H2 MFC set to  0.000000
5/7/2010	12:32:21 PM	BCl3 MFC set to  0.000000
5/7/2010	12:32:21 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:32:21 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:32:21 PM	Tube furnace set to 0
5/7/2010	12:37:21 PM	H2 valve closed
5/7/2010	12:37:21 PM	BCl3 valve closed
5/7/2010	12:37:21 PM	PH3 valve closed
5/7/2010	12:37:21 PM	SiCl4 pre valve closed
5/7/2010	12:37:21 PM	SiCl4 post valve closed
5/7/2010	12:37:21 PM	Main Vac valve closed
5/7/2010	12:37:21 PM	Bypass valve closed
5/7/2010	12:37:21 PM	Bubbler valve closed
5/7/2010	12:37:21 PM	Helium valve opened
5/7/2010	12:37:21 PM	Helium MFC set to  500.000000
5/7/2010	12:37:21 PM	H2 MFC set to  0.000000
5/7/2010	12:37:21 PM	BCl3 MFC set to  0.000000
5/7/2010	12:37:21 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:37:21 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:37:22 PM	Tube furnace set to 0
5/7/2010	12:38:43 PM	Helium valve closed
5/7/2010	12:38:43 PM	H2 valve closed
5/7/2010	12:38:43 PM	BCl3 valve closed
5/7/2010	12:38:43 PM	PH3 valve closed
5/7/2010	12:38:43 PM	SiCl4 pre valve closed
5/7/2010	12:38:43 PM	SiCl4 post valve closed
5/7/2010	12:38:43 PM	Main Vac valve closed
5/7/2010	12:38:43 PM	Bypass valve closed
5/7/2010	12:38:43 PM	Bubbler valve closed
5/7/2010	12:38:43 PM	Helium MFC set to  0.000000
5/7/2010	12:38:43 PM	H2 MFC set to  0.000000
5/7/2010	12:38:43 PM	BCl3 MFC set to  0.000000
5/7/2010	12:38:43 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:38:43 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:38:44 PM	Tube furnace set to 0
5/7/2010	12:38:59 PM	Helium valve closed
5/7/2010	12:38:59 PM	H2 valve closed
5/7/2010	12:38:59 PM	BCl3 valve closed
5/7/2010	12:38:59 PM	PH3 valve closed
5/7/2010	12:38:59 PM	SiCl4 pre valve closed
5/7/2010	12:38:59 PM	SiCl4 post valve closed
5/7/2010	12:38:59 PM	Main Vac valve closed
5/7/2010	12:38:59 PM	Bubbler valve closed
5/7/2010	12:38:59 PM	Bypass valve opened
5/7/2010	12:38:59 PM	Helium MFC set to  0.000000
5/7/2010	12:38:59 PM	H2 MFC set to  0.000000
5/7/2010	12:38:59 PM	BCl3 MFC set to  0.000000
5/7/2010	12:38:59 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:38:59 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:38:59 PM	Tube furnace set to 0
5/7/2010	12:39:29 PM	Helium valve closed
5/7/2010	12:39:29 PM	H2 valve closed
5/7/2010	12:39:29 PM	BCl3 valve closed
5/7/2010	12:39:29 PM	PH3 valve closed
5/7/2010	12:39:29 PM	SiCl4 pre valve closed
5/7/2010	12:39:29 PM	SiCl4 post valve closed
5/7/2010	12:39:29 PM	Bubbler valve closed
5/7/2010	12:39:29 PM	Main Vac valve opened
5/7/2010	12:39:29 PM	Bypass valve opened
5/7/2010	12:39:29 PM	Helium MFC set to  0.000000
5/7/2010	12:39:29 PM	H2 MFC set to  0.000000
5/7/2010	12:39:29 PM	BCl3 MFC set to  0.000000
5/7/2010	12:39:29 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:39:29 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:39:29 PM	Tube furnace set to 0
5/7/2010	12:44:29 PM	H2 valve closed
5/7/2010	12:44:29 PM	BCl3 valve closed
5/7/2010	12:44:29 PM	PH3 valve closed
5/7/2010	12:44:29 PM	SiCl4 pre valve closed
5/7/2010	12:44:29 PM	SiCl4 post valve closed
5/7/2010	12:44:29 PM	Main Vac valve closed
5/7/2010	12:44:29 PM	Bypass valve closed
5/7/2010	12:44:29 PM	Bubbler valve closed
5/7/2010	12:44:29 PM	Helium valve opened
5/7/2010	12:44:29 PM	Helium MFC set to  500.000000
5/7/2010	12:44:29 PM	H2 MFC set to  0.000000
5/7/2010	12:44:29 PM	BCl3 MFC set to  0.000000
5/7/2010	12:44:29 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:44:29 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:44:29 PM	Tube furnace set to 0
5/7/2010	12:45:51 PM	Helium valve closed
5/7/2010	12:45:51 PM	H2 valve closed
5/7/2010	12:45:51 PM	BCl3 valve closed
5/7/2010	12:45:51 PM	PH3 valve closed
5/7/2010	12:45:51 PM	SiCl4 pre valve closed
5/7/2010	12:45:51 PM	SiCl4 post valve closed
5/7/2010	12:45:51 PM	Main Vac valve closed
5/7/2010	12:45:51 PM	Bypass valve closed
5/7/2010	12:45:51 PM	Bubbler valve closed
5/7/2010	12:45:51 PM	Helium MFC set to  0.000000
5/7/2010	12:45:51 PM	H2 MFC set to  0.000000
5/7/2010	12:45:51 PM	BCl3 MFC set to  0.000000
5/7/2010	12:45:51 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:45:51 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:45:51 PM	Tube furnace set to 0
5/7/2010	12:46:06 PM	Helium valve closed
5/7/2010	12:46:06 PM	H2 valve closed
5/7/2010	12:46:06 PM	BCl3 valve closed
5/7/2010	12:46:06 PM	PH3 valve closed
5/7/2010	12:46:06 PM	SiCl4 pre valve closed
5/7/2010	12:46:06 PM	SiCl4 post valve closed
5/7/2010	12:46:06 PM	Main Vac valve closed
5/7/2010	12:46:06 PM	Bubbler valve closed
5/7/2010	12:46:06 PM	Bypass valve opened
5/7/2010	12:46:06 PM	Helium MFC set to  0.000000
5/7/2010	12:46:06 PM	H2 MFC set to  0.000000
5/7/2010	12:46:06 PM	BCl3 MFC set to  0.000000
5/7/2010	12:46:06 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:46:06 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:46:06 PM	Tube furnace set to 0
5/7/2010	12:46:36 PM	Helium valve closed
5/7/2010	12:46:36 PM	H2 valve closed
5/7/2010	12:46:36 PM	BCl3 valve closed
5/7/2010	12:46:36 PM	PH3 valve closed
5/7/2010	12:46:36 PM	SiCl4 pre valve closed
5/7/2010	12:46:36 PM	SiCl4 post valve closed
5/7/2010	12:46:36 PM	Bubbler valve closed
5/7/2010	12:46:36 PM	Main Vac valve opened
5/7/2010	12:46:36 PM	Bypass valve opened
5/7/2010	12:46:36 PM	Helium MFC set to  0.000000
5/7/2010	12:46:36 PM	H2 MFC set to  0.000000
5/7/2010	12:46:36 PM	BCl3 MFC set to  0.000000
5/7/2010	12:46:36 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:46:36 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:46:37 PM	Tube furnace set to 0
5/7/2010	12:50:59 PM	Helium valve closed
5/7/2010	12:50:59 PM	H2 valve closed
5/7/2010	12:50:59 PM	BCl3 valve closed
5/7/2010	12:50:59 PM	PH3 valve closed
5/7/2010	12:50:59 PM	SiCl4 pre valve closed
5/7/2010	12:50:59 PM	SiCl4 post valve closed
5/7/2010	12:50:59 PM	Bubbler valve closed
5/7/2010	12:50:59 PM	Main Vac valve opened
5/7/2010	12:50:59 PM	Bypass valve opened
5/7/2010	12:50:59 PM	Helium MFC set to  0.000000
5/7/2010	12:50:59 PM	H2 MFC set to  0.000000
5/7/2010	12:50:59 PM	BCl3 MFC set to  0.000000
5/7/2010	12:50:59 PM	SiCl4 MFC set to  0.000000
5/7/2010	12:50:59 PM	Bypass solenoid MFC set to  0.000000
5/7/2010	12:50:59 PM	Tube furnace set to 0
5/7/2010	12:51:00 PM	Run finished at 12:51 PM
5/7/2010	12:51:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
